Overview of precision motion product categories, including piezo actuators, nanopositioning stages, fast steering mirrors, capacitive sensors, controllers, micropositioning stages, hexapods, photonics alignment solutions and piezo motor stages. >> Back topiezo-nanotechnology overview page.
Sub-nanometer resolution, load capacity to 100 kN, optional case, preload and position sensor.
Very high dynamics, sub-nanometer precise motion, 1 to 6 axes, frictionless flexure guides, parallel kinematics, parallel metrology and capacitive feedback.
Very fast piezo-driven systems for image stabilization, resolution enhancement and beam steering. 1 to 3 axes, up to 6° beam deflection.
Up to 0.01 nanometer resolution. Absolute measuring, noncontact, high bandwidth, high linearity and vacuum compatible; ideal for parallel metrology.
Digital and analog controllers, drivers and amplifiers for 100 V and 1000 V systems, up to 2000 W power; benchtop, 19-inch rack and OEM versions.
Micropositioning stages and actuators for linear, vertical, rotary and tilt motion.
Highly precise hexapod parallel-kinematics systems with six degrees of freedom. Sub-micron resolution, load capacity to 200 kg standard, with standard and custom designs.
Automated 6D alignment systems, hybrid aligners, photometers and PIMotion&Vision™ systems.
Servo motor controllers, stepper motor controllers and piezomotor controllers. Cost-effective single-channel controllers, automation controllers and custom designs to 300 axes.
PILine® ultrasonic motors and stages. Ultra-compact, velocity to 800 mm/s. NEXLINE® nano-drives for long range, high force and sub-nanometer resolution.