 |
|
|
| Piezo Solutions for Nanotechnology Applications
|
| NEXLINE® Nano positioning Actuators |
|
| N-110 NEXLINE® Miniature High-Load Piezo Nano positioning Drive
|
|
| |
- Winner of the SEMI Technology Innovation Showcase Award
- 3 mm Travel Range
- <0.1 Nano meter Resolution
- Active Force Generation to 30 N
- >50 N Holding Force Self-Locking
- Non Magnetic Option
|
|
PDF Files
| |
HTML Catalog Files
N-110
|
| N-214 NEXLINE® High-Load Piezo Nanopositioning Actuator
|
|
| |
- Winner of the SEMI Nano Technology Innovation Showcase Award
- 20 mm Travel Range, <0.1 Nano meter Resolution
- Integrated High-Resolution Incremental Encoder
- Active Force Generation to 400 N
- >600 N Holding Force, Self-Locking
- Non Magnetic Option
|
|
PDF Files
| |
HTML Catalog Files
N-214
|
| Ultrasonic Linear Actuators / Motors |
|
| M-674 PILine® RodDrive PiezoMotor Actuators
|
|
| |
- Drive-Component for Integration into Precision Positioning Systems
- Flexible Choice of Travel Ranges to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 N
- Minimum Incremental Motion to 50 Nano meters
- Velocity to 400 mm/s
- Self-Locking
- Non Magnetic Option
|
| P-652 PILine® Micro Piezomotor Actuator
|
|
| |
- Cost-Effective, High-Volume-Production Drive
- Piezo Micro-Motor: 9.0 x 6.5 x 2.4 mmł
- Travel Range 3.2 mm
- Velocity to 80 mm/s
- Self-Locking
- Non Magnetic Option
|
|
PDF Files
| |
HTML Catalog Files
P-652
|
| P-661 PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs
|
|
| |
- Patented Principle Features Very Compact Dimensions
- Velocity to 600 mm/s
- Acceleration to 15 g
- Minimum Incremental Motion to 50 Nano meters
- Self-Locking to 1.5 N
- 20000 h MTBF
- Non Magnetic Option
|
|
PDF Files
| |
HTML Catalog Files
P-661
|
| M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motor Actuators
|
|
| |
- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nano meter
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7 hPa
- Non Magnetic Option
|
| M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
|
|
| |
- Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
- 20 mm Travel Range
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Resolution to 100 Nano meters
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20000 h MTBF
- Vacuum Versions Available
- Non Magnetic Option
|
|
PDF Files
| |
HTML Catalog Files
M-663
|
| PMR 40.08 Rotary Motors |
|
| |
- Non Magnetic
- For Low-Speed Applications
- Suited for Hazardous Environments
- Excellent Start-Stop Performance
- Milliseconds Response Time
|
Motorized Actuators
|
| M-227 High-Resolution DC-Mike Actuators
|
|
| |
- 10, 25 & 50 mm Travel Ranges
- 50 Nano meters Minimum Incremental Motion
- Non-Rotating Tip
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Sub-Nano meter Resolution with Optional PZT Drive
- >5,000 Hours MTBF
|
|
PDF Files
| |
HTML Catalog Files
M-227
|
| M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators
|
|
| |
- 10 & 25 mm Travel Range
- 50 Nano meters Minimum Incremental Motion
- Non-Rotating Tip
- Velocity to 2 mm/sec.
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Origin and Limit Switches
- Front Mount or Clamp Mount
- >5,000 Hours MTB
|
| M-231 High-Resolution Closed-Loop DC-Mike Actuators
|
|
| |
- 17 mm Travel Range
- 100 Nano meters Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Origin and Limit Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours MTBF
|
|
PDF Files
| |
HTML Catalog Files
M-231
|
| M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator
|
|
| |
- 17 mm Travel Range
- 100 Nano meters Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Limit and Origin Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours MTBF
|
|
PDF Files
| |
HTML Catalog Files
M-232
|
| M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
|
|
| |
- 20 mm or 50 mm Travel Range
- 100 Nano meters Minimum Incremental Motion
- High-Speed Direct Drive Option
- 120 N Push/Pull Load
- 100 N Lateral Load Limit
- Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Limit & Origin Switches
- >20,000 Hours MTBF
- Vacuum Versions
|
| M-238 Heavy-Duty Precision Linear DC-Motor Actuator
|
|
| |
- High Load Capacity to 400 N
- Optional 100 Nano meters Direct Metrology Linear Encoder for Exceptional Precision
- Travel Range to 50 mm
- Max. Velocity: 30 mm/s
- Preloaded Frictionless Ball Screw
- MTBF >20.000 h
Vacuum-Compatible Versions Available for 10-6 hPa
|
|
PDF Files
| |
HTML Catalog Files
M-238
|
| M-168 High-Resolution Stepper-Mike Actuators
|
|
| |
- 10, 25 & 50 mm Travel Ranges
- Resolution <100 Nano meters
- 2- and 5-Phase Stepper Motor
- Manual Positioning Knob
- Sub-Nano meter Resolution with Optional PZT Actuator
- >5,000 Hours MTBF
|
|
PDF Files
| |
HTML Catalog Files
M-168
|
| M-631 Precision Micrometer Actuators
|
|
| |
- 10, 25 and 50 mm Travel
- Pitch 0.5 mm/Rev.
- Low-Friction Construction
- 1 Micron Manual Sensitivity
- Sub-Nano meter Resolution with Optional PZT Actuator
|
| M-653 Differential Micrometer Actuators
|
|
| |
- 100 Nano meters Sensitivity
- 1 Micron Graduations
- Travel to 20 mm
|
|
PDF Files
| |
HTML Catalog Files
M-653
|
Flexure-Guided Nano positioning Actuators
|
| P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
|
|
| |
- Flexure Guidance for Frictionless, Ultra-Straight Motion
- Travel Ranges to 480 Microns
- Resolution to 0.2 Nano meters
- High Dynamics and Stiffness
- PICMA® High-Performance Piezo Actuators
- Open and Closed-Loop Versions
- Ideal for OEM Applications
|
|
PDF Files
| |
HTML Catalog Files
P-601
|
| P-783 Piezoelectric Z-Nano positioning Stage / Actuator with Direct Metrology
|
|
| |
- Z-Axis Travel to 300 Micron
- Low Profile
- Frictionless Precision Flexure Guiding System
- Internal Motion Amplifier
- Closed-Loop Resolution <10 Nano meter
- PICMA® High-Performance Multilayer Piezo Drives
|
| P-290 Long-Travel Piezoelectric Z-Nano positioning Flexure Stage / Actuator
|
|
| |
- Vertical Travel to 1000 Micron
- Integrated Double-Flexure Motion Amplifier
- Non-Magnetic Stainless Steel Design
|
|
PDF Files
| |
HTML Catalog Files
P-290
|
| P-753 LISA Piezoelectric Nano Automation® Stages / Actuators with Direct Metrology
|
|
| |
- Unique Design: Both Stage and Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 Nano meter Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Multilayer Piezo Drives
- ID-Chip for Auto Calibrate Function
- Vacuum Versions Available
|
|
PDF Files
| |
HTML Catalog Files
P-753
|
Piezo Tranducers
|
| P-882 – P-888
PICMA® High-Performance Monolithic Multilayer Piezo Tranducers
|
|
| |
- Award-Winning Technology
- Low Operating Voltage
- Superior Lifetime Even Under Extreme Conditions
- Very Large Operating-Temperature Range
- High Humidity Resistance
- Excellent Temperature Stability
- High Stiffness
- UHV Compatible to 10-9 hPa
- Sub-Millisecond Response & Sub-Nano meter Resolution
|
| P-245 Preloaded Piezo Tranducers |
|
| |
- Travel Range to 180 µm
- Pushing Forces to 4500 N
- Pulling Forces to 500 N
- Sub-ms Response
- Sub-Nano meter Resolution
- Options: Vacuum, High- and Low-Temperature
|
| P-247 Preloaded High-Load Piezo tranducers
|
|
| |
- Extremely High Stiffness
- Pushing Forces to 30,000 N
- Pulling Forces to 3500 N
- Travel Range to 120 µm
- Options: Versions for Vacuum, High- and Low-Temperatures and with Water-Resistant Case
|
| P-840
Preloaded Piezo Translators (LVPZT)
|
|
| |
- Displacement to 90 µm
- Pushing Forces to 1000 N
- Preloaded for Pulling Forces to 50 N
- Sub-msec Response
- Sub-Nano meter Resolution
- Options: Ball Tip, Vacuum Versions
|
| P-871
Closed-Loop, High-Deflection PICMA® Multilayer Piezo Bender tranducers
|
|
|
- Closed-Loop Operation for Superior Accuracy
- Nano meter-Range Resolution
- Deflection up to 1.6 mm
- Ceramic Insulation for Extended Lifetime
- Ideal for Scanning Applications
- Vacuum-Compatible Versions
- Low Operating Voltage
- Mounting Hardware Included
- Special Controllers / Drivers Available
|
|
PDF Files
| |
HTML Catalog Files
P-871
|
| P-286 Piezo Disk tranducers
|
|
| |
- Displacement to 200 µm
- Sub-Nano meter Resolution
- Low Cost
- Flat Design
|
| PL022 PICMA® Chip Miniature Piezo tranducers
|
|
| |
- Ceramic Encapsulation for Extended Lifetime
- Ultra-Compact, from 2 x 2 x 2 mm
- High Curie Temperature
- Ideal for Dynamic Operation
- Sub-Millisecond Response / Sub-Nano meter Resolution
- UHV Compatible to 10-9 hPa
- Superior Lifetime
|
| P-007 – P-056
PICA™-Stack / High Force Piezoceramic tranducers
|
|
| |
- High Load Capacity to 100 kN
- High Force Generation to 80 kN
- Large Cross Sections to 56 mm Diameter
- Variety of Shapes
- Extreme Reliability >1000,000,000 Cycles
- Proven and Flexible Design
- Sub-Nano meter-Resolution / Sub-Millisecond-Settling-Time
- Vacuum-Compatible Versions
|
|
