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Piezo Solutions for Nanotechnology Applications


Nano-Precision Piezo Actuators


Forces to 100 kN
Sub-Nano meter
   Resolution
Fast Response (to
   µsec -Range)
Extreme Lifetime

Ultrasonic Linear
Actuators / Motors


Non Magnetic
Velocity to 600 mm/s
Unlimited Travel
   Range
Forces to 30 N
Resolution to 50 nm

Flexible Piezoelectric
Patch Transducers


Actuator, Sensor,
   Energy Source
Highly Formable
   Ceramics
Can be Applied to
   Curved Surfaces
Cost-Effective

Nexline® Nano Pos- itioning Actuators


Non Magnetic
Forces to 600 N
<0.1 nm Resolution
Auto-Locking
Travel to 20 mm

Flexure-Guided Piezo Actuators


Sub-Nanometer
   Resolution
Fast Response
   (msec -Range)
Excellent Guiding
   Precision
Travel to 1 mm

PI and PI Ceramic are the leading manufacturers of ultra precision piezo actuators and pzt transducers for Nano positioning and micropositioning applications in industries such as: Semiconductors; Biotechnology and Medicine; Lasers, Optics, Microscopy; Aerospace Engineering; Precision Machining; Astronomy and Microsystems Technology. PI offers 5 different types of actuators:

Reasons for Choosing PI      Piezo University: Designing with Piezoelectrics       Groundbreaking Nano Technologies from PI

NEXLINE® Nano positioning Actuators

N-110 NEXLINE® Miniature High-Load Piezo Nano positioning Drive
  • Winner of the SEMI Technology Innovation Showcase Award
  • 3 mm Travel Range
  • <0.1 Nano meter Resolution
  • Active Force Generation to 30 N
  • >50 N Holding Force Self-Locking
  • Non Magnetic Option

PDF Files
HTML Catalog Files

N-110

N-214 NEXLINE® High-Load Piezo Nanopositioning Motor Actuator
  • Winner of the SEMI Nano Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 Nano meter Resolution
  • Integrated High-Resolution Incremental Encoder
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking
  • Non Magnetic Option

PDF Files
HTML Catalog Files

N-214

Ultrasonic Piezo Linear Actuators / Motors

M-674 PILine® RodDrive PiezoMotor Actuators
  • Drive-Component for Integration into Precision Positioning Systems
  • Flexible Choice of Travel Ranges to Several 100 mm
  • Flexible Choice of Push/Pull Forces to Several 10 N
  • Minimum Incremental Motion to 50 Nano meters
  • Velocity to 400 mm/s
  • Self-Locking
  • Non Magnetic Option

PDF Files
HTML Catalog Files

M-674
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P-652 PILine® Micro Piezomotor Actuator
  • Cost-Effective, High-Volume-Production Drive
  • Piezo Micro-Motor: 9.0 x 6.5 x 2.4 mmł
  • Travel Range 3.2 mm
  • Velocity to 80 mm/s
  • Self-Locking
  • Non Magnetic Option

PDF Files
HTML Catalog Files

P-652

P-661 PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs
  • Patented Principle Features Very Compact Dimensions
  • Velocity to 600 mm/s
  • Acceleration to 15 g
  • Minimum Incremental Motion to 50 Nano meters
  • Self-Locking to 1.5 N
  • 20000 h MTBF
  • Non Magnetic Option

PDF Files
HTML Catalog Files

P-661

M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motor Actuators
  • 20 mm Travel Range
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 Nano meter
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
  • Non Magnetic Option

PDF Files
HTML Catalog Files

M-661 - M-662
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M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 20 mm Travel Range
  • Velocity up to 500 mm/s
  • Accelerations up to 20 g
  • Resolution to 100 Nano meters
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available
  • Non Magnetic Option

PDF Files
HTML Catalog Files

M-663

Rotary Motors / Stages
  • Non Magnetic
  • Vey Compact
  • Excellent Start-Stop Performance
  • Milliseconds Response Time


HTML Files

Rotary Stage
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Motorized Actuators

M-227 High-Resolution DC-Mike Actuators
  • 10, 25 & 50 mm Travel Ranges
  • 50 Nano meters Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nano meter Resolution with Optional PZT Drive
  • >5,000 Hours MTBF

PDF Files
HTML Catalog Files

M-227

M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators
  • 10 & 25 mm Travel Range
  • 50 Nano meters Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB

PDF Files
HTML Catalog Files

M-230
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M-231 High-Resolution Closed-Loop DC-Mike Actuators
  • 17 mm Travel Range
  • 100 Nano meters Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF

PDF Files
HTML Catalog Files

M-231

M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator
  • 17 mm Travel Range
  • 100 Nano meters Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF

PDF Files
HTML Catalog Files

M-232

M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
  • 20 mm or 50 mm Travel Range
  • 100 Nano meters Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions

PDF Files
HTML Catalog Files

M-238
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M-238 Heavy-Duty Precision Linear DC-Motor Actuator
  • High Load Capacity to 400 N
  • Optional 100 Nano meters Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50 mm
  • Max. Velocity: 30 mm/s
  • Preloaded Frictionless Ball Screw
  • MTBF >20.000 h Vacuum-Compatible Versions Available for 10-6 hPa

PDF Files
HTML Catalog Files

M-238

M-168 High-Resolution Stepper-Mike Actuators
  • 10, 25 & 50 mm Travel Ranges
  • Resolution <100 Nano meters
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nano meter Resolution with Optional PZT Actuator
  • >5,000 Hours MTBF

PDF Files
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M-168

M-631 Precision Micrometer Actuators
  • 10, 25 and 50 mm Travel
  • Pitch 0.5 mm/Rev.
  • Low-Friction Construction
  • 1 Micron Manual Sensitivity
  • Sub-Nano meter Resolution with Optional PZT Actuator

PDF Files
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M-631
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M-653 Differential Micrometer Actuators
  • 100 Nano meters Sensitivity
  • 1 Micron Graduations
  • Travel to 20 mm

PDF Files
HTML Catalog Files

M-653

Flexure-Guided Nano positioning Actuators

P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Microns
  • Resolution to 0.2 Nano meters
  • High Dynamics and Stiffness
  • PICMA® High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications

PDF Files
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P-601

P-783 Piezoelectric Z-Nano positioning Stage / Actuator with Direct Metrology
  • Z-Axis Travel to 300 Micron
  • Low Profile
  • Frictionless Precision Flexure Guiding System
  • Internal Motion Amplifier
  • Closed-Loop Resolution <10 Nano meter
  • PICMA® High-Performance Multilayer Piezo Drives

PDF Files
HTML Catalog Files

P-783
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P-290 Long-Travel Piezoelectric Z-Nano positioning Flexure Stage / Actuator
  • Vertical Travel to 1000 Micron
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design

PDF Files
HTML Catalog Files

P-290

P-753 LISA Piezoelectric Nano Automation® Stages / Actuators with Direct Metrology
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nano meter Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA® High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available

PDF Files
HTML Catalog Files

P-753

Piezo Tranducers

P-882 – P-888 PICMA® High-Performance Monolithic Multilayer Piezo Tranducers
  • Award-Winning Technology
  • Low Operating Voltage
  • Superior Lifetime Even Under Extreme Conditions
  • Very Large Operating-Temperature Range
  • High Humidity Resistance
  • Excellent Temperature Stability
  • High Stiffness
  • UHV Compatible to 10-9 hPa
  • Sub-Millisecond Response & Sub-Nano meter Resolution

PDF Files
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P-882 – P-888
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P-245 Preloaded Piezo Tranducers
  • Travel Range to 180 µm
  • Pushing Forces to 4500 N
  • Pulling Forces to 500 N
  • Sub-ms Response
  • Sub-Nano meter Resolution
  • Options: Vacuum, High- and Low-Temperature

PDF Files
HTML Catalog Files

P-239 · P-244 · P-245

P-247 Preloaded High-Load Piezo tranducers
  • Extremely High Stiffness
  • Pushing Forces to 30,000 N
  • Pulling Forces to 3500 N
  • Travel Range to 120 µm
  • Options: Versions for Vacuum, High- and Low-Temperatures and with Water-Resistant Case

PDF Files
HTML Catalog Files

P-242 · P-243 · P-246 · P-247

P-840 Preloaded Piezo Translators (LVPZT)
  • Displacement to 90 µm
  • Pushing Forces to 1000 N
  • Preloaded for Pulling Forces to 50 N
  • Sub-msec Response
  • Sub-Nano meter Resolution
  • Options: Ball Tip, Vacuum Versions

PDF Files
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P-840 · P-841
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P-871 Closed-Loop, High-Deflection PICMA® Multilayer Piezo Bender tranducers
  • Closed-Loop Operation for Superior Accuracy
  • Nano meter-Range Resolution
  • Deflection up to 1.6 mm
  • Ceramic Insulation for Extended Lifetime
  • Ideal for Scanning Applications
  • Vacuum-Compatible Versions
  • Low Operating Voltage
  • Mounting Hardware Included
  • Special Controllers / Drivers Available

PDF Files
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P-871

P-286 Piezo Disk tranducers
  • Displacement to 200 µm
  • Sub-Nano meter Resolution
  • Low Cost
  • Flat Design

PDF Files
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P-286 · P-288 · P-289

PL022 PICMA® Chip Miniature Piezo tranducers
  • Ceramic Encapsulation for Extended Lifetime
  • Ultra-Compact, from 2 x 2 x 2 mm
  • High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nano meter Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime

PDF Files
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PL022 · PL033 · PL055
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P-007 – P-056 PICA-Stack / High Force Piezoceramic tranducers
  • High Load Capacity to 100 kN
  • High Force Generation to 80 kN
  • Large Cross Sections to 56 mm Diameter
  • Variety of Shapes
  • Extreme Reliability >1000,000,000 Cycles
  • Proven and Flexible Design
  • Sub-Nano meter-Resolution / Sub-Millisecond-Settling-Time
  • Vacuum-Compatible Versions

PDF Files
HTML Catalog Files

P-007 – P-056